Investigation of radio-frequency, capacitively-coupled large area industrial reactor: cost-effective production of thin film microcrystalline silicon for solar cells
2007
Details
Title
Investigation of radio-frequency, capacitively-coupled large area industrial reactor: cost-effective production of thin film microcrystalline silicon for solar cells
Author(s)
Strahm, B.
Date
2007
Keywords
Note
EPFL thesis 3895(07)
Laboratories
CRPP
SPC
SPC
Record Appears in
Scientific production and competences > SB - School of Basic Sciences > SPC - Swiss Plasma Center > SPC - Swiss Plasma Center
Work produced at EPFL
Technical Reports
Published
Work produced at EPFL
Technical Reports
Published
Record creation date
2008-04-18