Probe measurements of plasma potential nonuniformity due to edge asymmetry in large-area radio-frequency reactors: the telegraph effect


Year:
2005
Keywords:
Note:
published under ref : Journal of Applied Physics, Volume 97, Issue 12, pp. 123308-123308-13 (2005).
Laboratories:
SPC
CRPP




 Record created 2008-04-18, last modified 2018-09-13

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