Infoscience

Report

Probe measurements of plasma potential nonuniformity due to edge asymmetry in large-area radio-frequency reactors: the telegraph effect

    Keywords: LRP 801

    Note:

    published under ref : Journal of Applied Physics, Volume 97, Issue 12, pp. 123308-123308-13 (2005).

    Reference

    • CRPP-REPORT-2005-004

    Record created on 2008-04-18, modified on 2016-08-08

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