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report
Non-uniform rf plasma potential due to edge asymmetry in large-area rf reactors
2004
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Name
lrp_788_04_hq.pdf
Access type
openaccess
Size
3.01 MB
Format
Adobe PDF
Checksum (MD5)
449f2a8eeff35c8348c67c901d838a84
Non-uniform rf plasma potential due to edge asymmetry in large-area rf reactors
lrp_788_04_hq.pdf
openaccess
3.01 MB
Adobe PDF
449f2a8eeff35c8348c67c901d838a84