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A gas flow uniformity study in large-area showerhead reactors for RF plasma deposition
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A gas flow uniformity study in large-area showerhe[...]
-
Sansonnens, L.
et al
main
file(s):
lrp_642_99_hq
version 1
lrp_642_99_hq.pdf
[634.31 KB]
27 Jan 2018, 13:09
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