Diborane nitrogen/ammonia plasma chemistry investigated by infrared absorption spectroscopy
Franz, D.; Hollenstein, M.; Hollenstein, Ch.
1998

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Title Diborane nitrogen/ammonia plasma chemistry investigated by infrared absorption spectroscopy
Author(s) Franz, D. ; Hollenstein, M. ; Hollenstein, Ch.
Date 1998
Keywords
Laboratories CRPP
SPC
Record Appears in Scientific production and competences > SB - School of Basic Sciences > SPC - Swiss Plasma Center > SPC - Swiss Plasma Center
Work produced at EPFL
Technical Reports
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