Role of metastable atoms in Argon-diluted Silane RF plasmas

report

Role of metastable atoms in Argon-diluted Silane RF plasmas

•

•

Hollenstein, Ch.

1994

Name

lrp_490_94_hq.pdf

Access type

openaccess

Size

1021.26 KB

Format

Adobe PDF

Checksum (MD5)

5898594a64a2025e0144c39f752e4522