Comment on "Ion energy uniformity in high-frequency capacitive discharges" [Appl. Phys. Lett. 86, 021501 (2005)]


Published in:
Applied Physics Letters, 87, 7
Year:
2005
ISSN:
0003-6951
ISBN:
0003-6951
Laboratories:
SPC
CRPP




 Record created 2008-04-16, last modified 2018-09-13


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