Loading...
research article
Electrostatic charging: Mechanism of substrate charging after plasma processing
Type
research article
Authors
Belinger, A.
•
Bulkin, P.
•
Delaunay, L.
•
Elyaakoubi, M.
•
Perrin, J.
•
Schmitt, J.
•
Turlot, E.
•
•
•
Publication date
2001
Start page
19
End page
21
Peer reviewed
REVIEWED
Available on Infoscience
April 16, 2008
Use this identifier to reference this record