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research article
Spatiotemporal powder formation and trapping in radio frequency silane plasmas using two-dimensional polarization-sensitive laser scattering
Type
research article
Web of Science ID
WOS:A1995RD76600080
Authors
Publication date
1995
Publisher
Volume
13
Issue
3
Start page
918
End page
926
Note
41st National Symposium of the American-Vacuum-Society OCT 24-28, 1994, DENVER, CO; 1; Part 1
Peer reviewed
REVIEWED
Available on Infoscience
April 16, 2008
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