Spatiotemporal powder formation and trapping in radio frequency silane plasmas using two-dimensional polarization-sensitive laser scattering


Published in:
Journal of Vacuum Science & Technology a-Vacuum Surfaces and Films, 13, 3, 918-926
Year:
1995
Publisher:
American Vacuum Society
ISSN:
0734-2101
Note:
41st National Symposium of the American-Vacuum-Society OCT 24-28, 1994, DENVER, CO; 1; Part 1
Laboratories:
SPC
CRPP




 Record created 2008-04-16, last modified 2018-01-28


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