research article
Spatiotemporal powder formation and trapping in radio frequency silane plasmas using two-dimensional polarization-sensitive laser scattering
Cite this item
Dorier, J. L., Hollenstein, C., & Howling, A. A. (1995). Spatiotemporal powder formation and trapping in radio frequency silane plasmas using two-dimensional polarization-sensitive laser scattering. Journal of Vacuum Science & Technology A-Vacuum Surfaces and Films, 13(3), 918–926. https://doi.org/10.1116/1.579852
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Type
research article
Web of Science ID
WOS:A1995RD76600080
Author(s)
Date Issued
1995
Publisher
Volume
13
Issue
3
Start page
918
End page
926
Note
41st National Symposium of the American-Vacuum-Society OCT 24-28, 1994, DENVER, CO; 1; Part 1
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
Available on Infoscience
April 16, 2008
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