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  4. Reconstruction of the Time-Averaged Sheath Potential Profile in an Argon Radiofrequency Plasma Using the Ion Energy-Distribution
 
research article

Reconstruction of the Time-Averaged Sheath Potential Profile in an Argon Radiofrequency Plasma Using the Ion Energy-Distribution

Fivaz, M.
•
Brunner, S.  
•
Schwarzenbach, W.
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1995
Plasma Sources Science & Technology

Charge-exchange collisions and radio frequency (RF) excitation combine to give peaks in the ion energy distribution measured at the ground electrode of an argon plasma in a capacitive reactor. These peaks are used as a diagnostic to reconstruct the profile of the time-averaged potential in the sheath. Particle-in-cell (PIC) simulations show that the method is accurate. The method is applied to investigate the sheath thickness as a function of excitation frequency at constant plasma power. The time-averaged potential is found to be parabolic in both experimental measurements and numerical simulations.

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Type
research article
DOI
10.1088/0963-0252/4/3/007
Web of Science ID

WOS:A1995RT66000007

Author(s)
Fivaz, M.
Brunner, S.  
Schwarzenbach, W.
Howling, A. A.  
Hollenstein, C.  
Date Issued

1995

Published in
Plasma Sources Science & Technology
Volume

4

Issue

3

Start page

373

End page

378

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
CRPP  
SPC  
Available on Infoscience
April 16, 2008
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/21336
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