Direct Visual Observation of Powder Dynamics in Rf Plasma-Assisted Deposition

Contamination due to particles generated and suspended in silane rf plasmas is investigated. Powder is rendered visible by illumination of the reactor volume. This simple diagnostic for global, spatio-temporal powder dynamics is used to study particle formation, trapping, and powder reduction by power modulation.


Published in:
Applied Physics Letters, 59, 12, 1409-1411
Year:
1991
ISSN:
0003-6951
Laboratories:
SPC
CRPP




 Record created 2008-04-16, last modified 2018-09-13


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