research article
Direct Visual Observation of Powder Dynamics in Rf Plasma-Assisted Deposition
Contamination due to particles generated and suspended in silane rf plasmas is investigated. Powder is rendered visible by illumination of the reactor volume. This simple diagnostic for global, spatio-temporal powder dynamics is used to study particle formation, trapping, and powder reduction by power modulation.
Cite this item
Howling, A. A., Hollenstein, C., & Paris, P. J. (1991). Direct Visual Observation of Powder Dynamics in Rf Plasma-Assisted Deposition. Applied Physics Letters, 59(12), 1409–1411. https://doi.org/10.1063/1.105322
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Type
research article
Author(s)
Date Issued
1991
Published in
Volume
59
Issue
12
Start page
1409
End page
1411
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
Available on Infoscience
April 16, 2008
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