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research article
Taking piezoelectric microsystems from the laboratory to production
Type
research article
Web of Science ID
WOS:000251795200019
Authors
Raeder, H.
•
Tyholdt, F.
•
Booij, W.
•
•
Ostbo, N. P.
•
Bredesen, R.
•
Prume, K.
•
Rijnders, G.
•
Publication date
2007
Published in
Volume
19
Issue
4
Start page
357
End page
362
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
April 11, 2008
Use this identifier to reference this record