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research article
A highly sensitive Pb(Zr,Ti)O-3 thin film ultrasonic micro-sensor with a grooved diaphragm
Type
research article
Web of Science ID
WOS:000252257100004
Authors
Publication date
2007
Volume
54
Issue
12
Start page
2439
End page
2445
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
April 11, 2008
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