A highly sensitive Pb(Zr,Ti)O-3 thin film ultrasonic micro-sensor with a grooved diaphragm


Published in:
IEEE Transactions on Ultrasonics Ferroelectrics And Frequency Control, 54, 12, 2439-2445
Year:
2007
Other identifiers:
Laboratories:




 Record created 2008-04-11, last modified 2018-03-17


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