Optimisation of a Thick-Film 10...400 N Force Sensor

Abstract: The ring-on-ring bending principle allows the fabrication of simple, low-cost thick-film piezoresistive sensors for compressive forces in the 10 to 400 N range. However some imperfections are encountered in its basic embodiment, such as relatively high force-signal hysteresis and nonrepeatability (up to ca. 5%). These shortcoming were studied in this work, and major improvements achieved. Hysteresis was found to be mainly due to friction at the outer support ring, and considerably reduced by inserting a compliant silicone glue ring. The same glue ring was used to permanently bond the sensor to a rigid base, thereby giving well-defined and constant boundary conditions and also considerably improving the repeatability of the sensitivity. Overall, hysteresis and repeatability error were reduced down to a level of ca. 1%.


Published in:
Microelectronics Reliability, 48, 6, 902-905
Year:
2008
Publisher:
Elsevier
ISSN:
0026-2714
Keywords:
Note:
Originally published in IMAPS Poland 2007 proceedings; invited for publication to Microelectronics Reliability
Other identifiers:
Laboratories:




 Record created 2008-03-17, last modified 2018-01-28

Rate this document:

Rate this document:
1
2
3
 
(Not yet reviewed)