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Abstract

We present a hybrid CMOS based microsystem where magnetic actuation of microparticles is combined with integrated optical detection via Single Photon Avalanche Diodes (SPADs). The system’s configuration permits the manipulation and detection of single magnetic particles having diameters of 1, 3 and 5 µm. We are able to show a size sensitivity of the particle detection, with a clear distinction between different particle diameters.

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