Piezoelectric thin films: Evaluation of electrical and electromechanical characteristics for MEMS devices
2007
Details
Title
Piezoelectric thin films: Evaluation of electrical and electromechanical characteristics for MEMS devices
Author(s)
Prume, K. ; Muralt, P. ; Calame, F. ; Schmitz-Kempen, T. ; Tiedke, S.
Published in
Ieee Transactions On Ultrasonics Ferroelectrics And Frequency Control
Volume
54
Issue
1
Pages
8-14
Date
2007
ISSN
0885-3010
Other identifier(s)
DAR: 10091
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Laboratories
LC
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > LC - Ceramics Laboratory
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date
2007-10-18