Piezoelectric thin films: Evaluation of electrical and electromechanical characteristics for MEMS devices


Published in:
Ieee Transactions On Ultrasonics Ferroelectrics And Frequency Control, 54, 1, 8-14
Year:
2007
Note:
0885-3010
Other identifiers:
Laboratories:




 Record created 2007-10-18, last modified 2018-03-17


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