research article
Piezoelectric thin films: Evaluation of electrical and electromechanical characteristics for MEMS devices
Cite this item
Prume, K., Muralt, P., Calame, F., Schmitz-Kempen, T., & Tiedke, S. (2007). Piezoelectric thin films: Evaluation of electrical and electromechanical characteristics for MEMS devices. IIEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 54(1), 8–14. https://doi.org/10.1109/TUFFC.2007.206
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Type
research article
Web of Science ID
WOS:000243042700001
Author(s)
Date Issued
2007
Volume
54
Issue
1
Start page
8
End page
14
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
Available on Infoscience
October 18, 2007
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