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research article
Active isolation of electronic micro-components with piezoelectrically transduced silicon MEMS devices
Type
research article
Web of Science ID
WOS:000243903300036
Authors
Publication date
2007
Published in
Volume
16
Issue
1
Start page
128
End page
134
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
October 18, 2007
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