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research article
Coherent grazing exit x-ray scattering geometry for probing the structure of thin films
We demonstrate a diffraction geometry which provides strong sensitivity to the microstructure of thin films. While a coherent beam of X-rays is being reflected from the surface of the sample, measurements were made of the scattering of the exit beam below the critical angle for total external reflection. This results in a strong signal with speckle modulations that are characteristic of the internal arrangement of grains at different depths within the film
Type
research article
Authors
Publication date
2004
Published in
Volume
84
Issue
11
Start page
1847
End page
1849
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
October 11, 2007
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