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conference paper
MEMS Tunable Capacitors With Fragmented Electrodes and Electro-Thermal Actuation
2004
15th MicroMechanics Europe Workshop
Type
conference paper
Authors
Publication date
2004
Published in
15th MicroMechanics Europe Workshop
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
October 10, 2007
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