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conference paper
High Tunning Range AISi RF MEMS Capacitors Fabricated with Sacrificial Amorphous Silicon Surface Micromachining
2003
Microelectronic Engineering
Type
conference paper
Web of Science ID
WOS:000222145400079
Authors
ā¢
FrƩdƩrico, S.
ā¢
ā¢
FlĆ¼ckiger, Ph.
ā¢
ā¢
Tsamados, D.
ā¢
Boussey, J.
ā¢
Chovet, A.
ā¢
Udrea, F.
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Curty, J.-P.
Publication date
2003
Published in
Microelectronic Engineering
Volume
73ā74
Start page
447
End page
451
Peer reviewed
NON-REVIEWED
EPFL units
Event name | Event place | Event date |
Cambridge, UK | 22-25 September 2003 | |
Available on Infoscience
October 10, 2007
Use this identifier to reference this record