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conference paper
High Tunning Range AISi RF MEMS Capacitors Fabricated with Sacrificial Amorphous Silicon Surface Micromachining
2003
Microelectronic Engineering
Type
conference paper
Web of Science ID
WOS:000222145400079
Authors
•
Frédérico, S.
•
•
Flückiger, Ph.
•
•
Tsamados, D.
•
Boussey, J.
•
Chovet, A.
•
Udrea, F.
•
Curty, J.-P.
Publication date
2003
Published in
Microelectronic Engineering
Volume
73–74
Start page
447
End page
451
Peer reviewed
NON-REVIEWED
EPFL units
Event name | Event place | Event date |
Cambridge, UK | 22-25 September 2003 | |
Available on Infoscience
October 10, 2007
Use this identifier to reference this record