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conference paper
A Study of Fabrication Techniques for Sub-10nm Thin Undulated Polysilicon Films
2003
2003 International Semiconductor Conference. CAS 2003 Proceedings
Type
conference paper
Authors
Publication date
2003
Published in
2003 International Semiconductor Conference. CAS 2003 Proceedings
Volume
1
Start page
95
End page
98
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
October 10, 2007
Use this identifier to reference this record