Infoscience

Journal article

LPCVD deposition of nanograin polysilicon ultra-thin films

Ecoffey, S.; Bouvet, D.; Ionescu, A. M.; Fazan, P.
  • Published in: Journal of Nanotechnology, vol. 13, num. 3, p. 290-293
  • Publication date: 2002

    Reference

    • NANOLAB-ARTICLE-2002-005

    Record created on 2007-10-10, modified on 2017-05-10

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