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research article

LPCVD deposition of nanograin polysilicon ultra-thin films

Ecoffey, S.  
•
Bouvet, D.  
•
Ionescu, A. M.  
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2002
Journal of Nanotechnology
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Type
research article
Author(s)
Ecoffey, S.  
Bouvet, D.  
Ionescu, A. M.  
Fazan, P.  
Date Issued

2002

Published in
Journal of Nanotechnology
Volume

13

Issue

3

Start page

290

End page

293

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NANOLAB  
Available on Infoscience
October 10, 2007
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/12741
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