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LPCVD deposition of nanograin polysilicon ultra-thin films

Ecoffey, S. ; Bouvet, D. ; Ionescu, A. M. ; Fazan, P.

Published in:
Journal of Nanotechnology, 13, 3, 290-293
Year:
2002
Laboratories:
NANOLAB

Record appears in:
Scientific production and competences > STI - School of Engineering > IEL - Institute of Electrical Engineering > NANOLAB - Nanoelectronic Devices Laboratory
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published



 Record created 2007-10-10, last modified 2018-12-03


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