research article
LPCVD deposition of nanograin polysilicon ultra-thin films
Type
research article
Author(s)
Date Issued
2002
Published in
Volume
13
Issue
3
Start page
290
End page
293
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
Available on Infoscience
October 10, 2007
Use this identifier to reference this record