HIGHLY SENSITIVE CANTILEVERS, WITH AND WITHOUT MAGNETIC TIP, FOR MAGNETIC RESONANCE FORCE MICROSCOPY

In this paper we present the fabrication and characterization of highly sensitive cantilevers, with and without magnetic tip, used for magnetic resonance force microscopy experiments. The full wafer silicon batch microfabrication was successful and the achieved production yield was about 70%. Cantilevers have been characterized in vacuum, at room temperature, and revealed promising properties for MRFM applications. A cantilever of 500x10x0.34 􀀃m3 dimensions, a resonance frequency of 1670 Hz and a spring constant of 0.00014 N/m, we measured a quality factor of 27000 giving a minimum detectable force of 8x10-17 N/Hz1/2.


Published in:
Digest of Technical Papers, 1537-1540
Presented at:
14th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers ’07), Lyon, France, June 10-14 , 2007
Year:
2007
Publisher:
Lyon, France, Transducers ’07
Laboratories:


Note: The status of this file is: EPFL only


 Record created 2007-09-13, last modified 2018-01-28

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