Co-integration of gate-all-around MOSFETs and local silicon-on insulator optical waveguides on bulk silicon for GHz on-chip optical signaling
2006
Details
Title
Co-integration of gate-all-around MOSFETs and local silicon-on insulator optical waveguides on bulk silicon for GHz on-chip optical signaling
Author(s)
Moselund, K. E. ; Tschuor, L. ; Bouvet, D. ; Pott, V. ; Dainesi, P. ; Eggimann, C. ; Le Thomas, N. ; Houdré, R. ; Ionescu, A. M.
Published in
Proceedings of IEEE 2006 silicon nanoelectronics workshop, VLSI 2006 workshop
Pages
31-32
Date
2006
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > NANOLAB - Nanoelectronic Devices Laboratory
Scientific production and competences > SB - School of Basic Sciences > IPHYS - Institute of Physics > SCI-SB-RH - Groupe SCI SB RH
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Scientific production and competences > SB - School of Basic Sciences > IPHYS - Institute of Physics > SCI-SB-RH - Groupe SCI SB RH
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2007-05-16