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Nanostencil-based lithography for silicon nanowires fabrication
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conference paper
Nanostencil-based lithography for silicon nanowires fabrication
Grogg, D.
•
Santschi, C.
•
Pott, V.
more
2005
Nanoelectronics Days 2005
Details
Metrics
Type
conference paper
Authors
Grogg, D.
•
Santschi, C.
•
Pott, V.
•
Ionescu, A. M.
•
Brugger, J.
Publication date
2005
Published in
Nanoelectronics Days 2005
Peer reviewed
REVIEWED
EPFL units
NANOLAB
Available on Infoscience
May 16, 2007
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/6951