Suspended-Gate MOSFET: bringing new MEMS functionality into solid-state MOS transistor
2005
Details
Title
Suspended-Gate MOSFET: bringing new MEMS functionality into solid-state MOS transistor
Author(s)
Abelé, N. ; Fritschi, R. ; Boucart, K. ; Casset, F. ; Ancey, P. ; Ionescu, A. M.
Published in
IEEE International Electron Device Meeting
Pages
479-481
Date
2005
Other identifier(s)
View record in Web of Science
Laboratories
NANOLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > NANOLAB - Nanoelectronic Devices Laboratory
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2007-05-16