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conference paper
Photoplastic shadow-masks for rapid resistless multi-layer micropatterning
2001
Proceedings of 11th International Conference on Solid-State Sensors and Actuators (Transducers ’01) and Eurosensors XV
not available
Type
conference paper
Authors
Publication date
2001
Published in
Proceedings of 11th International Conference on Solid-State Sensors and Actuators (Transducers ’01) and Eurosensors XV
Start page
1632
End page
1635
Peer reviewed
NON-REVIEWED
EPFL units
Event name | Event place | Event date |
Munich, Germany | 10-14 June, 2001 | |
Available on Infoscience
April 13, 2007
Use this identifier to reference this record