Photoplastic shadow-masks for rapid resistless multi-layer micropatterning
2001
Abstract
not available
Details
Title
Photoplastic shadow-masks for rapid resistless multi-layer micropatterning
Author(s)
Kim, G M ; Kim, B J ; Brugger, J
Published in
Proceedings of 11th International Conference on Solid-State Sensors and Actuators (Transducers ’01) and Eurosensors XV
Pages
1632-1635
Conference
11th International Conference on Solid-State Sensors and Actuators (Transducers ’01) and Eurosensors XV, Munich, Germany, 10-14 June, 2001
Date
2001
Laboratories
LMIS1
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS1 - Microsystems Laboratory 1
Conference Papers
Work produced at EPFL
Published
Conference Papers
Work produced at EPFL
Published
Record creation date
2007-04-13