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conference paper
SAMs meet MEMS - surface modification with self-assembled monolayers for the dry-demolding of photoplastic MEMS/NEMS
2001
Proceedings of the 2001 IEEE International Workshop on MEMS
Type
conference paper
Authors
Publication date
2001
Published in
Proceedings of the 2001 IEEE International Workshop on MEMS
Start page
106
End page
109
Peer reviewed
NON-REVIEWED
EPFL units
Event name | Event place | Event date |
Interlaken, Switzerland | 21-25 Jan, 2001 | |
Available on Infoscience
April 13, 2007
Use this identifier to reference this record