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conference paper
Micro- and nano-patterning using local deposition through miniaturized shadow mask
2003
Proceedings of 5th Korean MEMS Conference
not available
Type
conference paper
Authors
Publication date
2003
Published in
Proceedings of 5th Korean MEMS Conference
Peer reviewed
NON-REVIEWED
EPFL units
Event name | Event place | Event date |
Jeju, Korea | 15-17 May, 2003 | |
Available on Infoscience
April 13, 2007
Use this identifier to reference this record