Micro- and nano-patterning using local deposition through miniaturized shadow mask

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Published in:
Proceedings of 5th Korean MEMS Conference
Presented at:
5th Korean MEMS Conference, Jeju, Korea, 15-17 May, 2003
Year:
2003
Laboratories:




 Record created 2007-04-13, last modified 2018-03-17


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