Fabrication of an active nanostencil with intergrated microshutters

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Published in:
Proceedings of 12th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers ’03)
Presented at:
12th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’2003), Boston, USA, 8-12 June, 2003
Year:
2003
Laboratories:




 Record created 2007-04-13, last modified 2018-03-17


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