Conference paper

Micromechanical testing of SU-8 cantilevers

SU-8 is a photoplastic polymer with a wide range of applications in microtechnology. Cantilevers designed for a commercial Atomic Force Microscope (AFM) were fabricated in SU-8. The mechanical properties of these cantilevers were investigated using two microscale mechanical testing techniques: contact surface profilometer deflection, known as MAT-Test, and static load deflection using a specially designed test machine, the MFT2000. The Young’s modulus values from the microscale test methods are approximately 2-3 GPa. These results are compared with results from macroscale tests of 4-5 GPa. The test methods and the results are discussed.


    • LMIS1-CONF-2007-003

    Record created on 2007-04-13, modified on 2017-05-10


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