Exploring microstencils for sub-micron patternig using Pulsed Laser Deposition
Vroegindeweij, F; Steen, J; Brugger, J; Blank, D H A
2003

Abstract

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Details

Title Exploring microstencils for sub-micron patternig using Pulsed Laser Deposition
Author(s) Vroegindeweij, F ; Steen, J ; Brugger, J ; Blank, D H A
Published in Proceedings of 7th International Conference on Laser Ablation
Conference 7th International Conference on Laser Ablation, Hersonissos, Crete, Greece, 5-10 Oct, 2003
Date 2003
Laboratories LMIS1
Record Appears in Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS1 - Microsystems Laboratory 1
Conference Papers
Work produced at EPFL
Published
Record creation date 2007-04-13