Infoscience

Journal article

Optimization of large area YBa2Cu3O7-x films by single target ion beam sputtering

The authors report on the in-situ growth over large area of high-quality homogeneous YBa2Cu3O7-x films by single target ion beam sputtering. The 123 stoichiometry transfer to the substrates is obtained by using sufficiently low power ion beams and a grazing angle between the ion beam and the target. The as-deposited films show consistent homogeneity and reproducible superconducting properties (ΔTc<1 K, jc(77 K)>106 A cm-2 at 77 K) over areas larger than ≈30 cm2

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