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research article

CVD diamond probes for nanotechnology

Niedermann, P
•
Haenni, W
•
Morel, D
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1998
applied physics a : materials science & processing

Diamond tips are attractive tools for nanoscience because of their hardness and, when doped chemical vapor deposited (CVD) diamond is used, their electrical conductivity. In this article, devices based on CVD diamond coated silicon tips and molded diamond pyramids are described. A new type of tip, with a controlled selectively deposited diamond coating, on its upper part only, is presented, which will be useful for integration with actuators, sensors, etc. Pyramidal diamond tips with cantilevers have been micromachined and characterized, with apex radii in the range 10 to 40 nm. Structuring the diamond layer by reactive ion etching resulted in a very well defined shape of the cantilever. From resonance frequency measurements, Young's modulus of the diamond cantilevers was found to be in agreement with reported values. Preliminary tests have shown the pyramidal tips to be suitable for atomic force microscopy.

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Type
research article
DOI
10.1007/s003390051094
Author(s)
Niedermann, P
Haenni, W
Morel, D
Perret, A
Skinner, N
Indermuehle, PF
de Rooij, NF
Buffat, PA  
Date Issued

1998

Published in
applied physics a : materials science & processing
Volume

66

Issue

1-2

Start page

31

End page

4

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
CIME  
Available on Infoscience
February 15, 2007
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/2937
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