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research article
Electron holography study of voids in self-annealed implanted silicon
Type
research article
Web of Science ID
WOS:000077288700002
Authors
Beeli, C
•
Matteucci, G
•
Lulli, G
•
Merli, PG
•
Migliori, A
Publication date
1998
Published in
Volume
78
Issue
6
Start page
445
End page
451
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
February 15, 2007
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