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research article
Tridimensional characterization of voids in self-annealed implanted silicon using electron holography
Type
research article
Web of Science ID
WOS:A1997WZ67400002
Authors
Beeli, C
•
Matteucci, G
•
Migliori, A
•
Lulli, G
•
Merli, PG
Publication date
1997
Published in
Volume
70
Start page
3
End page
4
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
February 15, 2007
Use this identifier to reference this record