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  4. Structural and morphological characterization of Nb2O5 thin film deposited by reactive sputtering
 
research article

Structural and morphological characterization of Nb2O5 thin film deposited by reactive sputtering

Rosenfeld, D
•
Sanjines, R
•
Lévy, F
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1994
Journal of Vacuum Science & Technology A
  • Details
  • Metrics
Type
research article
DOI
10.1116/1.578909
Web of Science ID

WOS:A1994MT40800022

Author(s)
Rosenfeld, D
Sanjines, R
Lévy, F
Buffat, PA  
Demarne, V
Grisel, A
Date Issued

1994

Published in
Journal of Vacuum Science & Technology A
Volume

12

Start page

135

End page

139

Note

chercher

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
CIME  
Available on Infoscience
February 15, 2007
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/2822
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