Structural and morphological characterization of Nb2O5 thin film deposited by reactive sputtering
Rosenfeld, D; Sanjines, R; Lévy, F; Buffat, PA; Demarne, V; Grisel, A
1994

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Title Structural and morphological characterization of Nb2O5 thin film deposited by reactive sputtering
Author(s) Rosenfeld, D ; Sanjines, R ; Lévy, F ; Buffat, PA ; Demarne, V ; Grisel, A
Published in Journal of Vacuum Science & Technology A
Volume 12
Pages 135-139
Date 1994
Note chercher
DOI 10.1116/1.578909
Other identifier(s) View record in Web of Science
Laboratories CIME
Record Appears in Scientific production and competences > SB - School of Basic Sciences > CIME - Interdisciplinary Center for Electron Microscopy
Peer-reviewed publications
Work produced at EPFL
Journal Articles
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