Structural and morphological characterization of Nb2O5 thin film deposited by reactive sputtering
1994
Details
Title
Structural and morphological characterization of Nb2O5 thin film deposited by reactive sputtering
Author(s)
Rosenfeld, D ; Sanjines, R ; Lévy, F ; Buffat, PA ; Demarne, V ; Grisel, A
Published in
Journal of Vacuum Science & Technology A
Volume
12
Pages
135-139
Date
1994
Note
chercher
DOI
10.1116/1.578909
Other identifier(s)
View record in Web of Science
Laboratories
CIME