research article
Structural and morphological characterization of Nb2O5 thin film deposited by reactive sputtering
Cite this item
Rosenfeld, D., Sanjines, R., Lévy, F., Buffat, P., Demarne, V., & Grisel, A. (1994). Structural and morphological characterization of Nb2O5 thin film deposited by reactive sputtering. Journal of Vacuum Science & Technology A, 12, 135–139. https://doi.org/10.1116/1.578909
Click Copy to copy the citation, or select the text manually.
Type
research article
Web of Science ID
WOS:A1994MT40800022
Author(s)
Date Issued
1994
Published in
Volume
12
Start page
135
End page
139
Note
chercher
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
Available on Infoscience
February 15, 2007
Use this identifier to reference this record