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conference paper
Morphology and structure of thin TiSi/sub 2/ films on silicon
1989
Semiconductor Silicon. Materials Science and Technology. Proceedings of the Summer School.
Type
conference paper
Authors
Publication date
1989
Published in
Semiconductor Silicon. Materials Science and Technology. Proceedings of the Summer School.
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
February 15, 2007
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