Influence de l'énergie des ions et de la température de l'objet lors de l'amincissement par bombardement ionique de GaAs
1988
Files
Abstract
Effect ion energy and object temperature on thinning by ion bombardment of GaAs
Details
Title
Influence de l'énergie des ions et de la température de l'objet lors de l'amincissement par bombardement ionique de GaAs
Author(s)
Spycher, R ; Schmidt, F ; Buffat, PA
Published in
Helvetica Physica Acta
Volume
61
Pages
853-856
Date
1988
Additional link
E-Periodica
Laboratories
CIME
Record Appears in
Scientific production and competences > SB - School of Basic Sciences > CIME - Interdisciplinary Center for Electron Microscopy
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date
2007-02-15