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research article
Roughness of titanium silicide thin films investigated by optical diffusion measurements and electron microscopy
Type
research article
Web of Science ID
WOS:A1987H196400006
Authors
Publication date
1987
Published in
Volume
42
Issue
236
Start page
21
End page
3
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
February 15, 2007
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