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conference paper
Investigation of epitaxial titanium silicide thin films by high resolution electron microscopy
1987
Microscopy of Semiconducting Materials. Proceedings of the Institute of Physics Conference (IOP)
Type
conference paper
Web of Science ID
WOS:A1987AE30700085
Authors
Publication date
1987
Published in
Microscopy of Semiconducting Materials. Proceedings of the Institute of Physics Conference (IOP)
Volume
xvi
Start page
529
End page
534
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
February 15, 2007
Use this identifier to reference this record