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conference paper
Interfacial structure of titanium silicide films on silicon
1987
18th International Conference on the Physics of Semiconductors
Type
conference paper
Authors
Publication date
1987
Publisher
Published in
18th International Conference on the Physics of Semiconductors
Volume
1
Issue
2
Start page
327
End page
330
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
February 15, 2007
Use this identifier to reference this record