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research article
Correlation between process conditions, chemical composition and morphology of MoS2 films prepared by RF planar magnetron sputtering
Type
research article
Web of Science ID
WOS:A1986D620000025
Authors
Publication date
1986
Published in
Volume
19
Start page
1575
End page
1585
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
February 15, 2007
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