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conference paper
LF55GN Photosensitive Flexopolymer as a New Material for Ultra-Thick and High-Aspect-Ratio MEMS Fabrication
2007
Technical Digest of the IEEE MEMS 2007
Type
conference paper
Web of Science ID
WOS:000255867800004
Authors
Publication date
2007
Published in
Technical Digest of the IEEE MEMS 2007
Start page
219
End page
222
Peer reviewed
REVIEWED
EPFL units
Event name | Event place | Event date |
Kobe, Japan | January 21-25, 2007 | |
Available on Infoscience
February 13, 2007
Use this identifier to reference this record